| http://www.w3.org/ns/prov#value | - The conductive layer (B) 112 may be formed of an element selected from the group consisting of tantalum (Ta), titanium (Ti), molybdenum (Mo), and tungsten (W), or alloys mainly composed of these elements, or an alloy film made of a combination of these elements (typically, Mo???W alloy film, Mo???Ta alloy film), whereas the conductive layer (A) 111 may be formed of a tantalum nitride (TaN), tungst
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