| http://www.w3.org/ns/prov#value | - The smaller internal stress can reduce the difference of the energy level between the films, as well as prevent the film from peeling by the internal stress. [0163] The silicon nitride film formed under condition shown in the table 1 according to this embodiment has a distinct blocking effect against the elements belonging to Group 1 and Group 2 in the periodic table such as Na and Li, and can eff
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