| http://www.w3.org/ns/prov#value | - This arm plate 7 is formed of a rigid material, including ceramics or carbon materials, which will not be deformed even in a heat treatment performed at a temperature of 23??? C. to 250??? C. The arm plate 7 includes a plate member 71 having a circular arc to extend along the periphery of the wafer W, and a plurality of holding portion 72 which extend inwardly from the bottom portion of the inner
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