| http://www.w3.org/ns/prov#value | - The solution according to the second aspect of the disclosure is distinguished by the fact that the focal length of the second optical component, which is also referred to as optical condenser, is adjustable, whereby it becomes possible to vary the illumination, in particular the size of the illuminated area in an exit pupil plane, and thus to vary the illumination setting of the illumination syst
|
