| http://www.w3.org/ns/prov#value | - The design data of the illumination optical apparatus (1-PL) used herein includes, for example, data of the optical system (6-PL) from just after the micro fly's eye lens 5 to just before the wafer W, i.e., data such as curvature radii of respective optical surfaces, axial separations of respective optical surfaces, refractive indices and types of optical materials forming the respective optical m
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