About: http://webisa.webdatacommons.org/304770456

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The test station 10 can test the chambers of the polishing head for pressure and vacuum leaks including leaks across the various chambers (cross talk).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com