| http://www.w3.org/ns/prov#value | - The insulating layer 729 can be formed with an inorganic insulating material such as silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, or aluminum oxynitride; an inorganic siloxane based insulating material having an Si???O???Si bond among compounds made of silicon, oxygen, and hydrogen, using a siloxane based material as a starting material; or an organic silox
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