| http://www.w3.org/ns/prov#value | - The outermost surface of first layer of aluminum interconnection 4 in contact hole 6 is exposed to plasma of a fluorine contained gas such as CHF3 or oxygen gas during the step of forming contact hole 6, so that an alterated layer of aluminum (a layer formed of fluoride or oxide and having insulating properties) 201 having a thickness of approximately 100??? is formed on the outermost surface of f
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