| http://www.w3.org/ns/prov#value | - The invention provides a housing that excludes a gas such as ozone to prevent interaction...http://www.google.com/patents/US7247337?utm_source=gb-gplus-sharePatent US7247337 - Removing ozone from an environment by filtration before fabricating a micro array in the ozone-reduced environment; lower defect rateAdvanced Patent SearchPublication numberUS7247337 B1Publication typeGrantApplication number
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