| http://www.w3.org/ns/prov#value | - This polishing pad is a non-foam, but the water-soluble material dispersed in the polishing pad is dissolved during polishing to generate foam-like pores in the surface of the polishing pad, and the polishing pad is swollen to reduce the hardness of the surface of the polishing pad, and thus this polishing pad is significantly effective for improvement in planarity and improvement in polishing rat
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