| http://www.w3.org/ns/prov#value | - The process temperature for nitridation of oxide may be about 600??? C. It is to be appreciated, however, that the nitridation can be accomplished at various process times and temperatures, including from about room temperature to about 1,100??? C. [0103] Next, as set forth in block 504 of FIG. 10, the power to energy source 450 is set and the appropriate frequency, such as for example, a microwav
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