About: http://webisa.webdatacommons.org/305154512

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The implant process 26 is conducted perpendicular to the surface of the substrate 10 and employs, for example, P-type dopants such as boron (B) or BF2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com