| http://www.w3.org/ns/prov#value | - This application claimsthe right of priority under 35 U.S.C. .sctn.119 based on Japanese Patent Application No. 2002-151637, filed on May 24, 2002, which is hereby incorporated by reference herein in its entirety as if fully set forth herein.BACKGROUND OF THE INVENTIONThe present invention relates generally to exposure apparatuses, and more particularly to an exposure apparatus that is used to exp
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