| http://www.w3.org/ns/prov#value | - he lifetime of substrate processing system componentsUS5953200 *Feb 5, 1998Sep 14, 1999Vlsi Technology, Inc.Multiple pole electrostatic chuck with self healing mechanism for wafer clampingUS5958813 *Nov 25, 1997Sep 28, 1999Kyocera CorporationSemi-insulating aluminum nitride sintered bodyUS5998320 *Nov 1, 1996Dec 7, 1999Ngk Insulators, Ltd.Aluminum nitride sintered body, metal including member, ele
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