| http://www.w3.org/ns/prov#value | - The micro electronic mechanical system 3 in the invention refers to electronic elements having the function of, for example, electrical switches, inductors, capacitors, resonators, antennas, microrelays, optical switches, magnetic heads for hard disks, microphones, biosensors, DNA chips, microreactors, printheads, and acceleration sensors, pressure sensors, and other various sensors, and display d
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