| http://www.w3.org/ns/prov#value | - Thus, with regard particularly to the alignment mark on the wafer, the optical contrast of this alignment mark has been a very important factor to thegain of the signal as already described with respect to the example of FIG. 1 which is the conventional method of catching the optical image of the alignment mark on the wafer to detect an optical signal, whereas the gain of the optical signal obtain
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