| http://www.w3.org/ns/prov#value | - The above and other needs are met by the present invention which, in a preferred embodiment, provides a microelectromechanical device comprising a microelectronic substrate, a microactuator disposed thereon and comprised of a single crystalline material, such as silicon, and at least one metallic structure disposed on the substrate in a spaced relationship from the microactuator and preferably in
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