| http://www.w3.org/ns/prov#value | - Thus, there is a possibility of vanish away the Ru film 12 from the structure after repeating the ashing step several times even though the entire Ru film 12 cannot be removed by the one ashing step. [0009] For solving such a problem, Yunogami et al. (U.S. Pat. No. 6,326,218) disclose a method for preventing the Ru film 12 from erosion at the time of ashing the resist pattern 13 by forming a plati
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