| http://www.w3.org/ns/prov#value | - The present inventors have found, through an extensive study, that the concentration of these elements for a semiconductor to be used in a semiconductor device such as a TFT is preferably controlled, from the viewpoint of assuring favorable characteristics and reliability, to be in the range of from 1???1015 atoms.cm-3 to 1 atom %, and more preferably, in the range of from 1???1015 to 1???1019 ato
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