| http://www.w3.org/ns/prov#value | - The developing solution supply mechanism has a mechanism for scanning from one end to the other end of the wafer, but same effects may be obtained by other mechanisms, such as a mechanism for supplying the developing solution while rotating a linear nozzle 104 relatively to the wafer 61 on the wafer 61 as shown in FIGS. 10A and 10B, a mechanism for supplying the developing solution on the entire s
|
