| http://www.w3.org/ns/prov#value | - The polysilicon layer may further include impurities, such as oxygen or other precipitate-forming impurities, or lattice-strain-inducing impurities, such as phosphorous, to further improve the effectiveness of the gettering layer. [0039] In yet an alternative specific embodiment, the present invention provides a gettering layer 501, which is defined on the top surface of the substrate 500, as illu
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