About: http://webisa.webdatacommons.org/305837120

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The inorganic insulating material for the gate insulating layer 141 is selected from a group including silicon oxide (SiO2) and silicon nitride (SiNX).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com