| http://www.w3.org/ns/prov#value | - The branched measurement light components are input to a probe head 13 for measuring the thickness and a reference light generatingsection 14 for generating reference light, respectively.The probe head 13 is a light input/output means functioning as a light output means for irradiating the semiconductor wafer W with measurement light and a light input means for inputting again reflected light that
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