| http://www.w3.org/ns/prov#value | - The wafers 101, 111, and 121 respectively have: the MOSFETs 103, 113, and 123 which are elements that form a semiconductor circuit; a field oxide layer 116 formed of a silicon oxide or the like; wiring lines 114 and 104 formed of a metal, such as tungsten (W), aluminum (Al), or copper (Cu); contact plugs 104 a and 114 a; a penetrating wiring portion 117; and the insulating layers 125,126, and 128
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