| http://www.w3.org/ns/prov#value | - h as gate electrodes 6 and gate bus lines is formed. [0290] Note that, the wiring of the gate layer does not have to be made of the materials above, and hence various metals such as aluminum and aluminum alloy may be used for manufacturing the wiring, in consideration of electrical resistance, heat resistance, and subsequent manufacturing steps, etc. [0291] Then, as FIG. 6(e) shows, a silicon nitr
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