| http://www.w3.org/ns/prov#value | - The three-dimensional structure has only to be so structured that a plurality of micro three-dimensional structure elements typified by cantilevers 2 formed with a substrate of a relatively hard material such as Si or SiO2 used as the sacrifice layer by MEMS or NEMS technology or the like are arranged within a film-like elastic body, and thereafter the sacrifice layer is removed so that the indivi
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