| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS The above and other features and advantages of the present invention will become more apparent by describing in detail preferred embodiments thereof with reference to the attached drawings in which: FIG. 1 is a schematic drawing of a magnetron sputtering device as an example of a conventional IPVD apparatus; FIG. 2 is a vertical cross-sectional view of a magnetron
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