| http://www.w3.org/ns/prov#value | - The length Df of the movable section 20 a, 20 b is preferably 50 ??m to 2000 ??m, more preferably 100 ??m to 1000 ??m, and especially preferably 200 ??m to 600 ??m. [0142] The arrangement as described above exhibits such an extremely excellent effect that the displacement in the Y axis direction does not exceeds 10% with respect to the displacement in the X axis direction, while the device can be
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