| http://www.w3.org/ns/prov#value | - The above-described objects can be achieved by an element concentration measuring method comprising: irradiating X-rays to a sample to be measured including at least one film formed on a substrate; measuring an interference oscillation curve of the X-rays reflected on the sample to be measured; and measuring a concentration of an element adhered on a surface of the sample to be measured and/or seg
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