| http://www.w3.org/ns/prov#value | - The present invention relates to a sputtering target (which may be referred to merely as a target hereinafter), a transparent conductive oxide made of the sputtering target, and a process for producing the sputtering target.The present invention relates particularly to a target making it possible to suppress nodules generated when sputtering is used to form a transparent conductive oxide into a fi
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