| http://www.w3.org/ns/prov#value | - The insulating film 2677 can be formed to have a single-layer or stack-layer structure of an insulating film containing oxygen and/or nitrogen such as silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x>y), or silicon nitride oxide (SiNxOy) (x>y), a film containing carbon such as DLC (Diamond-Like Carbon), a film of an organic material such as epoxy, polyimide, polyamide,
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