| http://www.w3.org/ns/prov#value | - Thus, additional implants can also be provided such as by providing a third doped region of the second conductivity type at the first main surface of the first and second doped regions which are electrically connected to the second doped region and by providing a fourth doped region of the first conductivity type at one or both of the first main surface and a sidewall surface of the one trench 9 s
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