| http://www.w3.org/ns/prov#value | - The other regions, especially the regions each ranging from the side face of the convex portion 1 b to part of the bottom surface of the concave portion 1 a, constitute low defect regions Rb in which lattice defects D propagating from the substrate 1 hardly exist. [0098] Subsequently, as in the first embodiment, formed sequentially on the n-type GaN layer 11 are an n-type AlGaN cladding layer 12,
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