| http://www.w3.org/ns/prov#value | - The baffle 30, which may be any opaque material such as aluminum, is oriented such that its normal is orthogonal to the normal 16 to the wafer 18, and the baffle 32 is oriented such that its normal is parallel to the normal 16 to the substrate 18, although other orientations thereof are possible so long as the direct images of the corresponding arrays are occluded by the corresponding baffle from
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