| http://www.w3.org/ns/prov#value | - When a liquid, such as IPA or pure water, or a gas, such as N2 gas is discharged through the discharge ports 143 a, 143 b and 143 c formed in the under-plate 63 as shown in FIG. 19, the area of a region allocated to the radially outer discharge port is larger than that allocated to the radially inner discharge port.
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