| http://www.w3.org/ns/prov#value | - Thereafter, a mixed gas of an argon gas and a nitrogen gas (in which the partial pressure ratio (volume flow ratio) of the nitrogen gas is approximately 60%) is introduced into the first chamber A, and discharge is caused in the first chamber A. Thus, plasma of the argon gas and the nitrogen gas is generated, so that a reaction layer 6 of a compound including silicon and nitrogen as principal cons
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