| http://www.w3.org/ns/prov#value | - The actuator portions may comprise any type of actuator(s), for example, but not limited to, MEMS actuators, such as for example, similar to those described above with respect to FIGS. 15A-15H and 16A-16E. If MEMS actuators are employed, the MEMS actuators may be of the comb type, such as for example, as shown in FIGS. 20B-20D. Other types of actuators may also be employed, for example, electro-st
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