| http://www.w3.org/ns/prov#value | - The insulating film can be made from inorganic insulating material such as silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride and aluminum oxynitride; acrylic acid, mathacrylic acid or a derivative thereof; a heat-resistant polymer such as polyimide, aromatic polyimide and polybenzimidazole; an inorganic siloxane-based insulating material containing Si???O???Si bo
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