| http://www.w3.org/ns/prov#value | - When the magnetic film which mainly contains one kind or two or more kinds of elements of Fe, Co and Ni, the elements M (for example, Hf, etc.) and O is formed in the present invention, the present invention is characterized in that it uses the target composed of an oxide of the elements T (one or more kinds of Fe, Co, Ni) and the target composed of an oxide of the elements M as the targets used i
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