| http://www.w3.org/ns/prov#value | - While CVD techniques have been described with reference to many transition metals and to certain other metals (such as copper) and metalloids (such as silicon), commercial use of CVD for the most part has been confined to deposition of a few metals and metal compounds, such as silicon, tungsten, and for the co-deposition of certain III-V and II-VI compounds (denoting, respectively, a compound of a
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