| http://www.w3.org/ns/prov#value | - The semiconductor component of claim 38, wherein at least a portion of the first opening and the at least a second opening are filled with the at least one conductive material selected from the group consisting of aluminum, titanium, iridium, copper, nickel, gold, tungsten, silver, platinum, palladium, tantalum, molybdenum, tin, lead, zinc, alloys of these metals including solder, and any combinat
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