| http://www.w3.org/ns/prov#value | - When flattening a composite material which is a combination of different materials, again the problem is that there is a limit to flattening because the etching rate varies with the type of material.The method described in non-patent literature 3 which uses irradiation angles smaller than 30?? with respect to solid surfaces does not pay attention to controlling the cluster size of the gas cluster
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