| http://www.w3.org/ns/prov#value | - The chemical agent employed during CMP step (b) can comprise about 0.05 to about 6.0 wt. %, e.g., about 3 wt. %, of an oxidizer, such as hydrogen peroxide, about 0.03 to about 0.15 wt. %, e.g., about 0.06 wt. %, of an inhibitor, e.g. 5-methyl-benzotriazole, about 0.5 to about 2.0 wt. % e.g., about 1.0 wt. %, of a chelating agent, e.g., iminodiacetic acid, about 1.0 to about 6 wt. %, e.g., about 3
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