| http://www.w3.org/ns/prov#value | - The substrate 12 preferably comprises a semiconductor such as (100) silicon, especially for embodiments of the present invention wherein peripheral devices (e.g. addressing circuitry which is defined herein as any form of electronic circuitry for addressing the grating elements and supplying programming voltages thereto, and which may include feedback-control circuitry for controlling and maintain
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