| http://www.w3.org/ns/prov#value | - The etalon support 27 is preferably comprised of metal, such as copper or gold, or aluminum or diamond, or aluminum nitride or boron nitride or silicon carbide or beryllium oxide or silicon may similarly be utilized. [0055] While similar wavelength measurement results can be achieved via the use of a plurality, e.g., three completely separate phase shifted etalons, it must be appreciated that the
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