| http://www.w3.org/ns/prov#value | - The apparatus of claim 1 further comprising:an inner diameter surface treatment reactor chamber comprising:a third plurality of radio frequency electrodes, wherein at least one of the electrodes is a ground electrode; and a third generally tubular member in proximity to the third plurality of electrodes, wherein the third generally tubular member has an inside diameter of about 2% to about 7% grea
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