| http://www.w3.org/ns/prov#value | - The lowering of the resistanceword or bit line may also be attained.The wires (23 to 26) can be made of aluminum or copper or a high-melting point metal such as tungsten or molybdenum, or, more preferably, a higher melting point metallic silicide such as tungsten silicide, molybdenum or silicide.The planar members (21, 22) can be made of silicon, silicide, or tungsten silicide.Methods used to form
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