| http://www.w3.org/ns/prov#value | - The resist pattern is formed from the radiation-sensitive resin composition of the present invention by applying the above-described composition solution to a substrate such as a silicon wafer, wafer coated with aluminum, wafer coated with silicon nitride, or wafer coated with an organic lower layer reflection preventive film by rotational coating, cast coating, roll coating, and the like to form
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