About: http://webisa.webdatacommons.org/307102826

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The apparatus according to the invention is also applicable to the fabrication of different types of thin films including those of the semiconductor variety, as well as thin-film structures of display units by means of the ALE method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com