| http://www.w3.org/ns/prov#value | - There has been known apparatus in which a pattern drawn on an object to be measured such as a mask, reticle, or the like is formed as an image by the optical system, the light intensity distribution of the pattern image is photoelectrically scanned, a time-sequential photoelectric signal is compared with a predetermined threshold value (slice level), and thereby measuring the line width of the pat
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